JPS59100855U - 連続スパツタ装置 - Google Patents

連続スパツタ装置

Info

Publication number
JPS59100855U
JPS59100855U JP19663982U JP19663982U JPS59100855U JP S59100855 U JPS59100855 U JP S59100855U JP 19663982 U JP19663982 U JP 19663982U JP 19663982 U JP19663982 U JP 19663982U JP S59100855 U JPS59100855 U JP S59100855U
Authority
JP
Japan
Prior art keywords
chamber
continuous sputtering
gas introduction
main gas
piping system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19663982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321573Y2 (en]
Inventor
川上　伸男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP19663982U priority Critical patent/JPS59100855U/ja
Publication of JPS59100855U publication Critical patent/JPS59100855U/ja
Application granted granted Critical
Publication of JPS6321573Y2 publication Critical patent/JPS6321573Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19663982U 1982-12-24 1982-12-24 連続スパツタ装置 Granted JPS59100855U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19663982U JPS59100855U (ja) 1982-12-24 1982-12-24 連続スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19663982U JPS59100855U (ja) 1982-12-24 1982-12-24 連続スパツタ装置

Publications (2)

Publication Number Publication Date
JPS59100855U true JPS59100855U (ja) 1984-07-07
JPS6321573Y2 JPS6321573Y2 (en]) 1988-06-14

Family

ID=30421766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19663982U Granted JPS59100855U (ja) 1982-12-24 1982-12-24 連続スパツタ装置

Country Status (1)

Country Link
JP (1) JPS59100855U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933155U (en]) * 1972-06-27 1974-03-23
JPS56130470A (en) * 1980-03-14 1981-10-13 Hitachi Ltd Sputtering apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933155U (en]) * 1972-06-27 1974-03-23
JPS56130470A (en) * 1980-03-14 1981-10-13 Hitachi Ltd Sputtering apparatus

Also Published As

Publication number Publication date
JPS6321573Y2 (en]) 1988-06-14

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